Ying-Chieh Lee
National Pingtung University of Science & Technology Taiwan
Title: A Study on the Characteristics of Ni-Cr-Mn-Y-Dy Thin Film Resistors Using High Entropy Method
Biography
Biography: Ying-Chieh Lee
Abstract
Ni-Cr-Mn-Y-Dy resistive thin films were prepared on glass and Al2O3 substrates by DC magnetron co-sputtering from targets of Ni-Cr-Mn-Y casting alloy and Dy metals. Electrical properties and microstructures of Ni-Cr-Mn-Y-Dy films under different proportion of elements and annealing temperatures were investigated. The phase evolution, microstructural and composition of Ni-Cr-Mn-Y-Dy resistive films were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM), transmission electron microscopy (TEM) and Auger Electron Spectroscopy (AES). When the annealing temperature was set to 350 °C, the Ni-Cr-Mn-Y-Dy films with an amorphous structure was observed. It is found that the resistivity of Ni-Cr-Mn-Y films was increased with increasing of Dy content. The Ni-Cr-Mn-Y films with 33.2% Dy addition annealed at 300 °C which was exhibited the resistivity 1600 mW-cm with -8.2 ppm/°C of temperature coefficient of resistance (TCR).